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Program tackles challenges that remain in bringing EUVL to high volume manufacturing.
June 25, 2015
By: DAVID SAVASTANO
Editor, Ink World Magazine
Toshiba Corporation, SanDisk Corporation and imec have expanded their strategic partnership, with Toshiba and SanDisk joining imec’s industrial affiliation program on advanced patterning. This program tackles the critical challenges that remain in bringing EUVL to high volume manufacturing. The program also develops other technologies for extending 193nm immersion lithography. Toshiba and SanDisk have been core partners in imec’s industrial affiliation program in Advanced Memory since 2011. ...
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